Design, Fabrication And Analysis Of Silicon Hollow Microneedles For Transdermal Drug Delivery System For Treatment Of Hemodynamic Dysfunctions

硅中空微针透皮给药系统的设计,制造和分析的血流动力学功能障碍治疗 注:没有中文版本,只有英文版本
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Abstract: In this paper, we present design, fabrication and coupled multifield analysis of hollow out-of-plane silicon microneedles with piezoelectrically actuated microfluidic device for transdermal drug delivery (TDD) system for treatment of cardiovascular or hemodynamic disorders such as hypertension. The mask layout design and fabrication process of silicon microneedles and reservoir involving deep reactive ion etching (DRIE) is first presented. This is followed by actual fabrication of silicon hollow microneedles by a series of combined isotropic and anisotropic etching processes using inductively coupled plasma (ICP) etching technology. Then coupled multifield analysis of a MEMS based piezoelectrically actuated device with integrated silicon microneedles is presented. The coupledfield analysis of hollow silicon microneedle array integrated with piezoelectric micropump has involved structural and fluid field couplings in a sequential structural-fluid analysis on a three-dimensional model of the microfluidic device. The effect of voltage and frequency on silicon membrane deflection and flow rate through the microneedle is investigated in the coupled field analysis using multiple code coupling method. The results of the present study provide valuable benchmark and prediction data to fabricate optimized designs of the silicon hollow microneedle based microfluidic devices for transdermal drug delivery applications.
翻译后摘要: 在本文中,我们提出了镂空的平面硅微针的设计,制造和耦合昌分析            压电驱动的微流体装置,为治疗心血管疾病的药物透皮给药系统(TDD)            或血流动力学障碍,如高血压。光罩布局设计和制造过程的硅微针            水库涉及深反应离子刻蚀(DRIE)首先提出的。其次是由实际的制造的硅            中空微针由一系列合并的各向同性和各向异性蚀刻过程,使用电感耦合等离子体(ICP)            蚀刻技术。然后再加昌分析基于压电驱动的MEMS器件与集成的硅            微针。空心的硅微针阵列集成压电微coupledfield分析            字段涉及结构和流体联轴器上的三维模型,在一个连续的结构流体分析            微流器件。硅膜偏转和流速通过微针上的电压和频率的效果            在使用多个代码耦合法的耦合场分析研究。本研究的结果提供            有价值的基准和预测数据,制作的硅空心微针的优化设计基于微流控            透皮给药应用的设备。
Author: M. W. Ashraf, S. Tayyaba, A. Nisar, N. Afzulpurkar, D. W. Bodhale, T. Lomas, A. Poyai;A. Tuantranont
Year: 2010
Source: Cardiovascular Engineering
Volume-OnPage: Volume 10, Number 3  91-108
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